Publication Citation
NIST Authors in Bold
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| Author(s): | Jay F. Marchiando; Joseph J. Kopanski; J R. Lowney; |
|---|---|
| Title: | A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements |
| Published: | February 01, 1998 |
| Abstract: | |
| Citation: | Journal of Vacuum Science and Technology |
| Volume: | B. 16 |
| Issue: | 1 |
| Pages: | pp. 463 - 470 |
| Research Areas: |