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Publication Citation: A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements

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Author(s): Jay F. Marchiando; Joseph J. Kopanski; J R. Lowney;
Title: A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements
Published: February 01, 1998
Abstract:
Citation: Journal of Vacuum Science and Technology
Volume: B. 16
Issue: 1
Pages: pp. 463 - 470
Research Areas: