Publication Citation
NIST Authors in Bold
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| Author(s): | Thomas J. Shaffner; Alain C. Diebold; R. C. McDonald; David G. Seiler; W M. Bullis; |
|---|---|
| Title: | Business and Manufacturing Motivations for the Development of Analytical Technology and Metrology for Semiconductors |
| Published: | December 31, 1995 |
| Abstract: | |
| Proceedings: | Semiconductor Characterization - Present Status and Future Needs |
| Pages: | pp. 1 - 10 |
| Location: | Gaithersburg, MD |
| Research Areas: |