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Publication Citation: Business and Manufacturing Motivations for the Development of Analytical Technology and Metrology for Semiconductors

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Author(s): Thomas J. Shaffner; Alain C. Diebold; R. C. McDonald; David G. Seiler; W M. Bullis;
Title: Business and Manufacturing Motivations for the Development of Analytical Technology and Metrology for Semiconductors
Published: December 31, 1995
Abstract:
Proceedings: Semiconductor Characterization - Present Status and Future Needs
Pages: pp. 1 - 10
Location: Gaithersburg, MD
Research Areas: