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Kinetic-Energy Distributions of Ions Sampled from Radio-Frequency Discharges in Helium, Nitrogen, and Oxygen

Published

Author(s)

Richard J. Van Brunt, James K. Olthoff, S. B. Radovanov
Proceedings Title
Proc. Eleventh International Conference on Gas Discharges and Their Applications
Conference Dates
September 11-15, 1995
Conference Location
Tokyo, 1, JA

Citation

Van Brunt, R. , Olthoff, J. and Radovanov, S. (1995), Kinetic-Energy Distributions of Ions Sampled from Radio-Frequency Discharges in Helium, Nitrogen, and Oxygen, Proc. Eleventh International Conference on Gas Discharges and Their Applications, Tokyo, 1, JA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=24420 (Accessed March 28, 2024)
Created August 31, 1995, Updated October 12, 2021