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Publication Citation: Characterization of Two-Dimensional Dopant Profiles: Status and Review

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Author(s): Alain C. Diebold; M. Kump; Joseph J. Kopanski; David G. Seiler;
Title: Characterization of Two-Dimensional Dopant Profiles: Status and Review
Published: December 31, 1995
Abstract:
Proceedings: Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors
Pages: pp. 2.1 - 2.8
Location: Research Triangle Park, NC
Dates: March 20-22, 1995
Research Areas: