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Publication Citation: Two-Dimensional Scanning Capacitance Microscopy Measurements of Cross-Sectioned Very Large Scale Integration Test Structures

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Author(s): G. Neubauer; A. Erickson; C. C. Williams; Joseph J. Kopanski; M. Rodgers; D. Adderton;
Title: Two-Dimensional Scanning Capacitance Microscopy Measurements of Cross-Sectioned Very Large Scale Integration Test Structures
Published: February 01, 1996
Abstract:
Citation: Journal of Vacuum Science and Technology
Volume: B 14
Issue: 1
Pages: pp. 426 - 432
Research Areas: