Publication Citation
NIST Authors in Bold
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| Author(s): | John A. Dagata; W. F. Tseng; J. Bennett; E. A. Dobisz; J. Schneir; Howard H. Harary; |
|---|---|
| Title: | Integration of Scanning Tunneling Microscope Nanolithography and Electronics Device Processing |
| Published: | August 01, 1992 |
| Abstract: | |
| Citation: | Journal of Vacuum Science and Technology |
| Volume: | A 10 |
| Issue: | 4 |
| Pages: | pp. 2105 - 2113 |
| Research Areas: |