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Publication Citation: Integration of Scanning Tunneling Microscope Nanolithography and Electronics Device Processing

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Author(s): John A. Dagata; W. F. Tseng; J. Bennett; E. A. Dobisz; J. Schneir; Howard H. Harary;
Title: Integration of Scanning Tunneling Microscope Nanolithography and Electronics Device Processing
Published: August 01, 1992
Abstract:
Citation: Journal of Vacuum Science and Technology
Volume: A 10
Issue: 4
Pages: pp. 2105 - 2113
Research Areas: