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Publication Citation: A New Test Structure for the Electrical Measurement of the Width of Short Features with Arbitrarily Wide Voltage Taps

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Author(s): Richard A. Allen; Michael W. Cresswell; Laurence M. Buck;
Title: A New Test Structure for the Electrical Measurement of the Width of Short Features with Arbitrarily Wide Voltage Taps
Published: June 01, 1992
Abstract:
Citation: IEEE Electron Device Letters
Volume: 13
Issue: 6
Pages: pp. 322 - 324
Research Areas: