Publication Citation
NIST Authors in Bold
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| Author(s): | Richard A. Allen; Michael W. Cresswell; Laurence M. Buck; |
|---|---|
| Title: | A New Test Structure for the Electrical Measurement of the Width of Short Features with Arbitrarily Wide Voltage Taps |
| Published: | June 01, 1992 |
| Abstract: | |
| Citation: | IEEE Electron Device Letters |
| Volume: | 13 |
| Issue: | 6 |
| Pages: | pp. 322 - 324 |
| Research Areas: |