| Author(s): |
Dylan F. Williams; David K. Walker; |
| Title: |
Lumped-Element Impedance Standards |
| Published: |
June 01, 1998 |
| Abstract: |
We measure the electrical parameters of commercial lumped-element impedance standards manufactured for the calibration of on-wafer probing systems. The standard's impedance depends not only on the standard itself, but also on probe placement, probe construction, and the reference calibration. |
| Proceedings: |
Tech Dig., Auto. RF Tech. Group Conf. |
| Pages: |
pp. 91 - 93 |
| Location: |
Baltimore, MD |
| Dates: |
June 7-12, 1998 |
| Keywords: |
;electrical impedance standard;on-wafer calibration;wafer probes; |
| Research Areas: |
Microwave Measurement Services |
