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Publication Citation: Lumped-Element Impedance Standards

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Author(s): Dylan F. Williams; David K. Walker;
Title: Lumped-Element Impedance Standards
Published: June 01, 1998
Abstract: We measure the electrical parameters of commercial lumped-element impedance standards manufactured for the calibration of on-wafer probing systems. The standard's impedance depends not only on the standard itself, but also on probe placement, probe construction, and the reference calibration.
Proceedings: Tech Dig., Auto. RF Tech. Group Conf.
Volume: 33
Pages: pp. 91 - 93
Location: Baltimore, MD
Dates: June 7-12, 1998
Keywords: electrical impedance standard,on-wafer calibration,wafer probes
Research Areas: Microwave Measurement Services
DOI: http://dx.doi.org/10.1109/ARFTG.1998.327285  (Note: May link to a non-U.S. Government webpage)
PDF version: PDF Document Click here to retrieve PDF version of paper (257KB)