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Publication Citation: High Spatial Resolution Mapping of Resistivity Variations in Semiconductors

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Author(s): Joseph J. Kopanski; G. P. Carver; J R. Lowney; D. S. Miles; Donald B. Novotny;
Title: High Spatial Resolution Mapping of Resistivity Variations in Semiconductors
Published: December 31, 1992
Abstract:
Citation: Solid-State Electronics
Volume: 35
Issue: 3
Pages: pp. 423 - 433
Research Areas: