Publication Citation
NIST Authors in Bold
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| Author(s): | G. Neubauer; A. Erickson; C. C. Williams; Joseph J. Kopanski; M. Rodgers; D. Adderton; |
|---|---|
| Title: | 2D-Scanning Capacitance Microscopy Measurement of Cross-Sectional VLSI Test Structures |
| Published: | December 31, 1995 |
| Abstract: | |
| Proceedings: | Semiconductor Characterization - Present Status and Future Needs |
| Pages: | pp. 318 - 321 |
| Location: | Gaithersburg, MD |
| Research Areas: |