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Publication Citation: 2D-Scanning Capacitance Microscopy Measurement of Cross-Sectional VLSI Test Structures

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Author(s): G. Neubauer; A. Erickson; C. C. Williams; Joseph J. Kopanski; M. Rodgers; D. Adderton;
Title: 2D-Scanning Capacitance Microscopy Measurement of Cross-Sectional VLSI Test Structures
Published: December 31, 1995
Abstract:
Proceedings: Semiconductor Characterization - Present Status and Future Needs
Pages: pp. 318 - 321
Location: Gaithersburg, MD
Research Areas: