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Publication Citation: High Spatial Resolution Mapping of Semiconductor Resistivity

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Author(s): Joseph J. Kopanski; J R. Lowney; D. S. Miles; Donald B. Novotny; G. P. Carver;
Title: High Spatial Resolution Mapping of Semiconductor Resistivity
Published: December 31, 1991
Abstract:
Proceedings: Extended Abstracts of the Electrochemical Society
Volume: 91-1
Pages: pp. 698 - 699
Location: Washington, DC
Dates: May 5-10, 1991
Research Areas: