Take a sneak peek at the new NIST.gov and let us know what you think!
(Please note: some content may not be complete on the beta site.).

View the beta site
NIST logo

Publication Citation: Proceedings of the Fourth International Conference on Materials and Process Characterization for VLSI

NIST Authors in Bold

Author(s): X. F. Zong; David G. Seiler; L. G. Song;
Title: Proceedings of the Fourth International Conference on Materials and Process Characterization for VLSI
Published: December 01, 1997
Abstract:
Citation: Asia-Pacific Microanalysis Association
Publisher: , Shanghai, CH
Research Areas: