Publication Citation
NIST Authors in Bold
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| Author(s): | David G. Seiler; Alain C. Diebold; W M. Bullis; Thomas J. Shaffner; R. C. McDonald; E. J. Walters; |
|---|---|
| Title: | Characterization and Metrology for ULSI Technology |
| Published: | November 01, 1998 |
| Abstract: | |
| Citation: | Characterization and Metrology for ULSI Technology, |
| Publisher: | American Institute of Physics, Melville, NY |
| Volume: | 449 |
| Pages: | pp. 1 - 960 |
| Research Areas: |