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Publication Citation: Characterization and Metrology for ULSI Technology

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Author(s): David G. Seiler; Alain C. Diebold; W M. Bullis; Thomas J. Shaffner; R. C. McDonald; E. J. Walters;
Title: Characterization and Metrology for ULSI Technology
Published: November 01, 1998
Abstract:
Citation: Characterization and Metrology for ULSI Technology,
Publisher: American Institute of Physics, Melville, NY
Volume: 449
Pages: pp. 1 - 960
Research Areas: