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|Author(s):||Dylan F. Williams; Roger Marks;|
|Title:||Compensation for Substrate Permittivity in Probe-Tip Calibration|
|Published:||December 01, 1994|
|Abstract:||We demonstrate a method of compensation for the effect of substrate permittivity on coplanar waveguide probe-tip scattering parameter calibrations, modeling the effect as a capacitance at the probe tip. Comparison to on-wafer multiline TRL calibration verifies its accuracy. The method allows calibration to the probe tip using generic off-wafer standards with accuracy comparable to that of on-wafer calibration.|
|Proceedings:||Tech Dig., Auto. RF Tech. Group Conf.|
|Pages:||pp. 20 - 30|
|Dates:||December 1-2, 1994|
|DOI:||http://dx.doi.org/10.1109/ARFTG.1994.327077 (Note: May link to a non-U.S. Government webpage)|
|PDF version:||Click here to retrieve PDF version of paper (595KB)|