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Publication Citation: Compensation for Substrate Permittivity in Probe-Tip Calibration

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Author(s): Dylan F. Williams; Roger Marks;
Title: Compensation for Substrate Permittivity in Probe-Tip Calibration
Published: December 01, 1994
Abstract: We demonstrate a method of compensation for the effect of substrate permittivity on coplanar waveguide probe-tip scattering parameter calibrations, modeling the effect as a capacitance at the probe tip. Comparison to on-wafer multiline TRL calibration verifies its accuracy. The method allows calibration to the probe tip using generic off-wafer standards with accuracy comparable to that of on-wafer calibration.
Proceedings: Tech Dig., Auto. RF Tech. Group Conf.
Volume: 26
Pages: pp. 20 - 30
Location: Boulder, CO
Dates: December 1-2, 1994
Research Areas: Electromagnetics
DOI: http://dx.doi.org/10.1109/ARFTG.1994.327077  (Note: May link to a non-U.S. Government webpage)
PDF version: PDF Document Click here to retrieve PDF version of paper (595KB)