Publication Citation
NIST Authors in Bold
 |
| Author(s): | W M. Bullis; S. Perkowitz; David G. Seiler; |
|---|---|
| Title: | Semiconductor Measurement Technology: Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry |
| Published: | December 01, 1995 |
| Abstract: | |
| Citation: | NIST SP - |
| Volume: | 400 |
| Issue: | 98 |
| Research Areas: |