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Publication Citation: Semiconductor Measurement Technology: Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry

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Author(s): W M. Bullis; S. Perkowitz; David G. Seiler;
Title: Semiconductor Measurement Technology: Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry
Published: December 01, 1995
Abstract:
Citation: NIST SP -
Volume: 400
Issue: 98
Research Areas: