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Publication Citation: Scanning Capacitance Microscopy Measurements and Modeling for Dopant Profiling of Silicon

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Author(s): Joseph J. Kopanski; Jay F. Marchiando; J R. Lowney;
Title: Scanning Capacitance Microscopy Measurements and Modeling for Dopant Profiling of Silicon
Published: December 31, 1996
Abstract:
Proceedings: Semiconductor Characterization - Present Status and Future Needs
Pages: pp. 308 - 312
Location: Gaithersburg, MD
Research Areas: