Publication Citation
NIST Authors in Bold
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| Author(s): | Joseph J. Kopanski; Jay F. Marchiando; J R. Lowney; |
|---|---|
| Title: | Scanning Capacitance Microscopy Measurements and Modeling for Dopant Profiling of Silicon |
| Published: | December 31, 1996 |
| Abstract: | |
| Proceedings: | Semiconductor Characterization - Present Status and Future Needs |
| Pages: | pp. 308 - 312 |
| Location: | Gaithersburg, MD |
| Research Areas: |