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Publication Citation: The Gaseous Electronics Conference Radio-frequency Reference Cell: A Defined Parallel-plate Radio-frequency System for Experimental and Theoretical Studies of Plasma-processing Discharges

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Author(s): J R. Roberts; James K. Olthoff; James R. Whetstone; Richard J. Van Brunt; Mark A. Sobolewski;
Title: The Gaseous Electronics Conference Radio-frequency Reference Cell: A Defined Parallel-plate Radio-frequency System for Experimental and Theoretical Studies of Plasma-processing Discharges
Published: January 01, 1994
Abstract:
Citation: Review of Scientific Instruments
Volume: 65
Issue: 1
Pages: pp. 140 - 154
Research Areas: Electronics & Telecommunications
PDF version: PDF Document Click here to retrieve PDF version of paper (8MB)