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Publication Citation: Verification of the Relation Between Two-Probe and Four-Probe Resistances as Measured on Silicon Wafers

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Author(s): Joseph J. Kopanski; John Albers; G. P. Carver; James R. Ehrstein;
Title: Verification of the Relation Between Two-Probe and Four-Probe Resistances as Measured on Silicon Wafers
Published: December 01, 1990
Abstract:
Citation: Journal of the Electrochemical Society
Volume: 137
Issue: 12
Pages: pp. 3935 - 3941
Research Areas: