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Publication Citation: Characterization and Metrology for ULSI Technology: 2000

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Author(s): David G. Seiler; Alain C. Diebold; Thomas J. Shaffner; R. C. McDonald; W M. Bullis; P. J. Smith; Erik M. Secula;
Title: Characterization and Metrology for ULSI Technology: 2000
Published: February 01, 2001
Abstract:
Citation: Characterization and Metrology for ULSI Technology: 2000
Publisher: American Institute of Physics, Melville, NY
Volume: 550
Pages: pp. 1 - 708
Research Areas: