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Publication Citation: Characterization of Two-Dimensional Dopant Profiles: Status and Review, Extended Abstracts

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Author(s): Alain C. Diebold; M. Kump; Joseph J. Kopanski; David G. Seiler;
Title: Characterization of Two-Dimensional Dopant Profiles: Status and Review, Extended Abstracts
Published: December 31, 1994
Abstract:
Proceedings: Extended Abstracts of the Electrochemical Society
Volume: 94-33
Pages: pp. 78 - 97
Location: Miami, FL
Dates: October 9-14, 1994
Research Areas: