Publication Citation
NIST Authors in Bold
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| Author(s): | Thomas A. Germer; M J. Fasolka; |
|---|---|
| Title: | Characterizing Surface Roughness of Thin Films By Polarized Light Scattering, ed. by A. Duparr {?} and B. Singh |
| Published: | January 01, 2003 |
| Abstract: | |
| Conference: | Proc. SPIE 5188 |
| Proceedings: | Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies |
| Pages: | pp. 264 - 275 |
| Location: | San Diego, CA |
| Dates: | August 3, 2003 |
| Research Areas: |