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Publication Citation: Measurement of the refractive index and thermo-optic coefficient of water near 193nm, ed. by A. Yen

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Author(s): J H. Burnett; Simon G. Kaplan;
Title: Measurement of the refractive index and thermo-optic coefficient of water near 193nm, ed. by A. Yen
Published: January 01, 2003
Abstract:
Citation: Optical Microlithography XVI Proc SPIE 5040
Volume: 5040
Pages: pp. 1142 - 1149
Research Areas: