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Publication Citation: The Oxidation of Deuterium-, Acetylene- and Ethylene-Terminated Si (100) by Atomic Oxygen

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Author(s): Maritoni A. Litorja; S A. Buntin;
Title: The Oxidation of Deuterium-, Acetylene- and Ethylene-Terminated Si (100) by Atomic Oxygen
Published: January 01, 2002
Abstract:
Citation: J Vac Sci and Tech A
Volume: 20
Research Areas: