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Publication Citation: Measurements on the NIST GEC Reference Cell, SPIE, Vol. 1392

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Author(s): J R. Roberts; James K. Olthoff; R J. Van brunt; James R. Whetstone;
Title: Measurements on the NIST GEC Reference Cell, SPIE, Vol. 1392
Published: January 01, 1991
Abstract:
Conference: Advanced Techniques for Integrated Circuit Processing
Proceedings: Advanced Techniques for Integrated Circuit
Location: Santa Clara, CA
Dates: October 1-5, 1990
Research Areas: