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Publication Citation: Mass Spectrometric and Optical Emission Diagnostics for RF Plasma Reactors

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Author(s): James K. Olthoff; J R. Roberts; R J. Van brunt; James R. Whetstone; M A. Sobolewski; S Djurovi{cacute};
Title: Mass Spectrometric and Optical Emission Diagnostics for RF Plasma Reactors
Published: January 01, 1991
Abstract:
Conference: SPIE Technical Symposium on Microelectronic Processing Integration
Proceedings: Technical Symposium on Microelectronic Processing Integration
Location: San Jose, CA
Dates: September 9-13, 1991
Research Areas: