Publication Citation
NIST Authors in Bold
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| Author(s): | James K. Olthoff; J R. Roberts; R J. Van brunt; James R. Whetstone; M A. Sobolewski; S Djurovi{cacute}; |
|---|---|
| Title: | Mass Spectrometric and Optical Emission Diagnostics for RF Plasma Reactors |
| Published: | January 01, 1991 |
| Abstract: | |
| Conference: | SPIE Technical Symposium on Microelectronic Processing Integration |
| Proceedings: | Technical Symposium on Microelectronic Processing Integration |
| Location: | San Jose, CA |
| Dates: | September 9-13, 1991 |
| Research Areas: |