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Publication Citation: Immersion Fluid Refractive Indices Using Prism Minimum Deviation Techniques, ed. by A. Yen

NIST Authors in Bold

Author(s): Roger H. French; Min K. Yang; M F. Lemon; R A. Synowicki; G K. Pribil; G Cooney; C M. Herzinger; S E. Green; John H. Burnett; Simon G. Kaplan;
Title: Immersion Fluid Refractive Indices Using Prism Minimum Deviation Techniques, ed. by A. Yen
Published: January 01, 2004
Abstract:
Conference: Proc. of SPIE XVII
Proceedings: Optical Microlithography
Location: Bellingham, WA
Dates: May 1, 2004
Research Areas: