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Publication Citation: Measurement of the refractive index and thermo-optic coefficient of water near 193 nm, ed. by Anthony Yen Page

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Author(s): John H. Burnett; Simon G. Kaplan;
Title: Measurement of the refractive index and thermo-optic coefficient of water near 193 nm, ed. by Anthony Yen Page
Published: January 01, 2003
Abstract:
Citation: Optical Microlithography XVI
Research Areas: