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Publication Citation: Absolute Spatially- and Temporally-Resolved Optical Emission Measurements of rf Glow Discharges in Argon

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Author(s): S Djurovi; J R. Roberts; M A. Sobolewski; James K. Olthoff;
Title: Absolute Spatially- and Temporally-Resolved Optical Emission Measurements of rf Glow Discharges in Argon
Published: January 01, 1993
Abstract:
Citation: Journal of Research (NIST JRES) -
Volume: 98
Research Areas: