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Publication Citation: Measurement of the refractive index and thermo-optic coefficient of water near 193 nm

NIST Authors in Bold

Author(s): John H. Burnett; Simon G. Kaplan;
Title: Measurement of the refractive index and thermo-optic coefficient of water near 193 nm
Published: January 01, 2004
Abstract:
Citation: Journal of Microlithography Microfabrication and Microsystems
Volume: 3
Pages: pp. 68 - 72
Research Areas: