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Publication Citation: Submillimeter-Wavelength Plasma Diagnostics For Semiconductor Manufacturing, ed. by D.G. Seiler, A.C. Diebold, T.J. Schaffner, R. McDonald, S. Zollner, R.P. Khosla, and E.M. Secula

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Author(s): Eric C. Benck; G Y. Golubiatnikov; Gerald T. Fraser; D L. Pluesquelic; B Ji; S A. Motika; E J. Karwacki;
Title: Submillimeter-Wavelength Plasma Diagnostics For Semiconductor Manufacturing, ed. by D.G. Seiler, A.C. Diebold, T.J. Schaffner, R. McDonald, S. Zollner, R.P. Khosla, and E.M. Secula
Published: March 01, 2003
Abstract:
Conference: Proc. 2003 International Conference
Proceedings: Characterization and Metrology for ULSI Technology: 2003 International Conference
Volume: C
Location: Austin, TX
Dates: March 24-28, 2003
Research Areas: