Publication Citation
NIST Authors in Bold
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| Author(s): | Eric C. Benck; G Y. Golubiatnikov; Gerald T. Fraser; D L. Pluesquelic; B Ji; S A. Motika; E J. Karwacki; |
|---|---|
| Title: | Submillimeter-Wavelength Plasma Diagnostics For Semiconductor Manufacturing, ed. by D.G. Seiler, A.C. Diebold, T.J. Schaffner, R. McDonald, S. Zollner, R.P. Khosla, and E.M. Secula |
| Published: | March 01, 2003 |
| Abstract: | |
| Conference: | Proc. 2003 International Conference |
| Proceedings: | Characterization and Metrology for ULSI Technology: 2003 International Conference |
| Volume: | C |
| Location: | Austin, TX |
| Dates: | March 24-28, 2003 |
| Research Areas: |