Publication Citation
NIST Authors in Bold
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| Author(s): | Charles S. Tarrio; Steven Grantham; M B. Squires; Robert E. Vest; Thomas B. Lucatorto; |
|---|---|
| Title: | Towards high accuracy reflectometry for extreme-ultraviolet lithography, |
| Published: | January 01, 2003 |
| Abstract: | |
| Citation: | Journal of Research of the National Institute of Standards and Technology |
| Volume: | 108 |
| Research Areas: |