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NIST Authors in Bold
|Author(s):||Charles S. Tarrio; Steven E. Grantham; M B. Squires; Robert E. Vest; Thomas B. Lucatorto;|
|Title:||Towards high accuracy reflectometry for extreme-ultraviolet lithography,|
|Published:||January 01, 2003|
|Citation:||Journal of Research of the National Institute of Standards and Technology|