NIST logo

Publication Citation: EUV testing of multilayer mirrors: critical issues

NIST Authors in Bold

Author(s): Shannon B. Hill; I Ermanoski; Steven E. Grantham; Charles S. Tarrio; Thomas B. Lucatorto; T. E. Madey; S Bajt; M Chandhok; P Yan; Obert Wood; S Wurm; N V. Edwards;
Title: EUV testing of multilayer mirrors: critical issues
Published: January 01, 2006
Abstract:
Conference: SPIE 6151
Proceedings: Emerging Lithographic Technologies X
Volume: S
Location: San Jose, CA
Dates: February 2, 2006
Research Areas: