Publication Citation
NIST Authors in Bold
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| Author(s): | Shannon B. Hill; I Ermanoski; Steven Grantham; Charles S. Tarrio; Thomas B. Lucatorto; T. E. Madey; S Bajt; M Chandhok; P Yan; Obert Wood; S Wurm; N V. Edwards; |
|---|---|
| Title: | EUV testing of multilayer mirrors: critical issues |
| Published: | January 01, 2006 |
| Abstract: | |
| Conference: | SPIE 6151 |
| Proceedings: | Emerging Lithographic Technologies X |
| Volume: | S |
| Location: | San Jose, CA |
| Dates: | February 2, 2006 |
| Research Areas: |