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Publication Citation: National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,

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Author(s): R N. Watts; D L. Ederer; Thomas B. Lucatorto; M Isaacson;
Title: National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,
Published: January 01, 1991
Abstract:
Citation: Soft X-Ray Projection Lithography
Research Areas: