NIST logo

Publication Citation: Optical Constants of In-Situ Deposited Films of Important EUV Multilayer Materials,

NIST Authors in Bold

Author(s): Charles S. Tarrio; R N. Watts; Thomas B. Lucatorto; J M. Slaughter; C M. Falco;
Title: Optical Constants of In-Situ Deposited Films of Important EUV Multilayer Materials,
Published: January 01, 1998
Abstract:
Citation: Applied Optics
Volume: 37
Research Areas: