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Publication Citation: Structure and Performance of Si/Mo Multilayer Mirrors for the Extreme Ultra-violet,

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Author(s): J M. Slaughter; D W. Schulze; C R. Hillis; A Mirone; R Stalio; R N. Watts; Charles S. Tarrio; Thomas B. Lucatorto; M Krumrey; P Mueller; C M. Falco;
Title: Structure and Performance of Si/Mo Multilayer Mirrors for the Extreme Ultra-violet,
Published: January 01, 1994
Abstract:
Citation: Journal of Applied Physics
Volume: 76
Research Areas: