Publication Citation
NIST Authors in Bold
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| Author(s): | M Nieto; J P. Allain; V Titov; M R. Hendricks; A Hassanein; D Rokusek; C Chrobak; Charles S. Tarrio; Yaniv Barad; Steven Grantham; Thomas B. Lucatorto; Bryan Rice; |
|---|---|
| Title: | Effect of xenon bombardment on ruthenium coated grazing incidence collector lifetime for EUV lithography, |
| Published: | January 01, 2006 |
| Abstract: | |
| Citation: | Journal of Applied Physics |
| Volume: | 100 |
| Research Areas: |