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Publication Citation: Effect of xenon bombardment on ruthenium coated grazing incidence collector lifetime for EUV lithography,

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Author(s): M Nieto; J P. Allain; V Titov; M R. Hendricks; A Hassanein; D Rokusek; C Chrobak; Charles S. Tarrio; Yaniv Barad; Steven E. Grantham; Thomas B. Lucatorto; Bryan Rice;
Title: Effect of xenon bombardment on ruthenium coated grazing incidence collector lifetime for EUV lithography,
Published: January 01, 2006
Abstract:
Citation: Journal of Applied Physics
Volume: 100
Research Areas: