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NIST Authors in Bold
|Author(s):||M Nieto; J P. Allain; V Titov; M R. Hendricks; A Hassanein; D Rokusek; C Chrobak; Charles S. Tarrio; Yaniv Barad; Steven E. Grantham; Thomas B. Lucatorto; Bryan Rice;|
|Title:||Effect of xenon bombardment on ruthenium coated grazing incidence collector lifetime for EUV lithography,|
|Published:||January 01, 2006|
|Citation:||Journal of Applied Physics|