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Publication Citation: Accurate pattern registration for integrated circuit tomography

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Author(s): Zachary H. Levine; Steven E. Grantham; S Neogi; S P. Frigo; I McNulty; C C. Retsch; Ying-ju Wang; Thomas B. Lucatorto;
Title: Accurate pattern registration for integrated circuit tomography
Published: January 01, 2001
Abstract:
Citation: Journal of Applied Physics
Volume: 90
Research Areas: