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NIST Authors in Bold
|Author(s):||Zachary H. Levine; Steven E. Grantham; S Neogi; S P. Frigo; I McNulty; C C. Retsch; Ying-ju Wang; Thomas B. Lucatorto;|
|Title:||Accurate pattern registration for integrated circuit tomography|
|Published:||January 01, 2001|
|Citation:||Journal of Applied Physics|