Publication Citation
NIST Authors in Bold
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| Author(s): | Zachary H. Levine; Steven Grantham; S Neogi; S P. Frigo; I McNulty; C C. Retsch; Ying-ju Wang; Thomas B. Lucatorto; |
|---|---|
| Title: | Accurate pattern registration for integrated circuit tomography |
| Published: | January 01, 2001 |
| Abstract: | |
| Citation: | Journal of Applied Physics |
| Volume: | 90 |
| Research Areas: |