Publication Citation
NIST Authors in Bold
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| Author(s): | Steven Grantham; Charles S. Tarrio; Thomas B. Lucatorto; |
|---|---|
| Title: | Accurate reflectometry for Extreme Ultraviolet Lithography at the National Institute of Standards and Technology |
| Published: | January 01, 2002 |
| Abstract: | |
| Citation: | Journal of Vacuum Science and Technology |
| Volume: | 20 |
| Research Areas: |