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Publication Citation: Design and performance of capping layers for extreme-ultraviolet multilayer mirrors

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Author(s): S Bajt; H N. Chapman; Nhan Nguyen; J Alameda; J C. Robinson; M E. Malinowski; Eric M. Gullikson; Andrew Aquila; Charles S. Tarrio; Steven E. Grantham;
Title: Design and performance of capping layers for extreme-ultraviolet multilayer mirrors
Published: January 01, 2003
Abstract:
Citation: Applied Optics
Volume: 42
Issue: 28
Research Areas: