Publication Citation
NIST Authors in Bold
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| Author(s): | S Bajt; H N. Chapman; Nhan Nguyen; J Alameda; J C. Robinson; M E. Malinowski; Eric M. Gullikson; Andrew Aquila; Charles S. Tarrio; Steven Grantham; |
|---|---|
| Title: | Design and performance of capping layers for extreme-ultraviolet multilayer mirrors |
| Published: | January 01, 2003 |
| Abstract: | |
| Citation: | Applied Optics |
| Volume: | 42 |
| Issue: | 28 |
| Research Areas: |