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Publication Citation: Accurate Characteristic Impedance Measurement on Silicon

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Author(s): Dylan F. Williams; Uwe Arz; Hartmut Grabinski;
Title: Accurate Characteristic Impedance Measurement on Silicon
Published: June 01, 1998
Abstract: This paper presents a new method that accurately determines the characteristic impedance of planar transmission lines printed on lossy dielectrics even when contact-pad capacitance and conductance are large. We demonstrate the method on a coplanar waveguide fabricated on fused silica and a microstrip line fabricated on a highly conductive silicon substrate.
Proceedings: Tech. Dig., IEEE MTT-S International Microwave Symposium
Volume: 3
Pages: pp. 1917 - 1920
Location: Baltimore, MD
Dates: June 7-12, 1998
Research Areas: Microwave Measurement Services
DOI: http://dx.doi.org/10.1109/MWSYM.1998.700955  (Note: May link to a non-U.S. Government webpage)
PDF version: PDF Document Click here to retrieve PDF version of paper (371KB)