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Publication Citation: Evaluation of alternative capping layers for EUVL mask ML blank, ed. by J.T. Weed and P.M. Martin

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Author(s): P Yan; E Spiller; Eric M. Gullikson; Shannon B. Hill;
Title: Evaluation of alternative capping layers for EUVL mask ML blank, ed. by J.T. Weed and P.M. Martin
Published: January 01, 2005
Abstract:
Citation: Proc 25th Annual BACUS Symp on Photomask Technology
Volume: 5992
Research Areas: