Publication Citation
NIST Authors in Bold
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| Author(s): | P Yan; E Spiller; Eric M. Gullikson; Shannon B. Hill; |
|---|---|
| Title: | Evaluation of alternative capping layers for EUVL mask ML blank, ed. by J.T. Weed and P.M. Martin |
| Published: | January 01, 2005 |
| Abstract: | |
| Citation: | Proc 25th Annual BACUS Symp on Photomask Technology |
| Volume: | 5992 |
| Research Areas: |