Publication Citation
NIST Authors in Bold
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| Author(s): | R N. Watts; D L. Ederer; Thomas B. Lucatorto; M Isaacson; |
|---|---|
| Title: | National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics, |
| Published: | January 01, 1991 |
| Abstract: | |
| Citation: | Soft X-Ray Projection Lithography Technical Digest Series |
| Publisher: | Optical Society of America, Washington, DC |
| Research Areas: |