Publication Citation
NIST Authors in Bold
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| Author(s): | Charles S. Tarrio; Robert E. Vest; S Grantham; |
|---|---|
| Title: | Absolute EUV Metrology, |
| Published: | January 01, 2001 |
| Abstract: | |
| Conference: | Proc. SPIE 4450 |
| Proceedings: | Harnessing Light: Optical Science and Metrology at NIST |
| Volume: | 4450 |
| Pages: | pp. 94 - 107 |
| Location: | San Diego, CA |
| Dates: | August 1, 2001 |
| Research Areas: |