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Publication Citation: Improvements to the NIST/DARPA EUV Reflectometry Facility

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Author(s): Charles S. Tarrio; Thomas B. Lucatorto; S Grantham; M B. Squires; Uwe Arp; Lu Deng;
Title: Improvements to the NIST/DARPA EUV Reflectometry Facility
Published: January 01, 2001
Abstract:
Conference: Proc. SPIE 4506
Proceedings: Soft X-Ray and UV Imaging II
Volume: 4506
Pages: pp. 32 - 39
Location: San Diego, CA
Dates: July 31, 2001
Research Areas: