Publication Citation
NIST Authors in Bold
 |
| Author(s): | Charles S. Tarrio; Thomas B. Lucatorto; S Grantham; M B. Squires; Uwe Arp; Lu Deng; |
|---|---|
| Title: | Improvements to the NIST/DARPA EUV Reflectometry Facility |
| Published: | January 01, 2001 |
| Abstract: | |
| Conference: | Proc. SPIE 4506 |
| Proceedings: | Soft X-Ray and UV Imaging II |
| Volume: | 4506 |
| Pages: | pp. 32 - 39 |
| Location: | San Diego, CA |
| Dates: | July 31, 2001 |
| Research Areas: |