Publication Citation
NIST Authors in Bold
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| Author(s): | P N. Peters; Richard B. Hoover; R N. Watts; Charles S. Tarrio; A. Walker; |
|---|---|
| Title: | Fabrication of Multilayer Optics by Sputtering: Application to EUV Optics with Greater than 30% Normal Reflectance, |
| Published: | January 01, 1995 |
| Abstract: | |
| Conference: | Proc. SPIE 2515 |
| Volume: | 2515 |
| Location: | CA |
| Dates: | January 1-30, 1995 |
| Research Areas: |