NIST logo

Publication Citation: Fabrication of Multilayer Optics by Sputtering: Application to EUV Optics with Greater than 30% Normal Reflectance,

NIST Authors in Bold

Author(s): P N. Peters; Richard B. Hoover; R N. Watts; Charles S. Tarrio; A. Walker;
Title: Fabrication of Multilayer Optics by Sputtering: Application to EUV Optics with Greater than 30% Normal Reflectance,
Published: January 01, 1995
Abstract:
Conference: Proc. SPIE 2515
Volume: 2515
Location: CA
Dates: January 1-30, 1995
Research Areas: