The Process Sensing Group studies, develops, and applies state-of-the-art measurement techniques and sensors for a wide range of applications including industrial process control, homeland security, and health care. Specific project areas include: Development/study of application-tunable, low cost, micromachined gas sensor arrays for hazardous gas detection, industrial process monitoring, and biomedical diagnostics; Development/study of electrical and optical measurement methods and sensor for process control of plasma reactors used in semiconductor manufacturing; Study of self-assembling organic and biological films for biomedical assays; Study of nanoparticle, nanorod, and nanotube materials for chemical and biological sensing. ![]() Chemical/Biochemical Microsensor Science — The Process Sensing Group at NIST is investigating a range of fundamental and technological issues related to next-generation chemical and biochemical measurements with solid state devices. A …
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