Pressure and Vacuum Group

Accurate Flow Meter and Viscometer for Gases — Integrated circuits are made in reaction chambers, or process "tools", each of which receives gases from several mass flow controllers at rates which can be as small as 1 cubic centimeter … High-Stability Transfer Standard for the Barometric Pressure Range of 100 Pa to 130 kPa — NIST has developed a new pressure transfer standard capable of absolute-mode and differential-mode operation in the range of 100 Pa to 130 kPa. This important pressure range spans the barometric … Physical Properties of Liquid Precursors — In striving to adhere to Moore's Law, the semiconductor industry is designing and using new metal-organic compounds. Precursor compounds deliver a metal atom to the surface of a hot silicon … Progress Toward Realizing Pressure with Dimensionally-Characterized Piston Gauges — NIST provides world-class standards for pressure measurements through development of innovative approaches to realization of standards. The purpose of the work described here is to determine the …

• Towards portable vacuum standards
• NIST Special Publication 250-39 2009 NIST Calibration Services for Pressure Using Piston Gauge Standards
• Effect of Dissolved Nitrogen Gas on the Density of Di-2-Ethylhexyl Sebacate: Working Fluid of the NIST Oil Ultrasonic Interferometer Manometer Pressure Standard