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Liya Yu

Liya Yu is a Process Engineer in the NanoFab Operations Group. She received a B.S. in Material Science from National Cheng Kung University, Taiwan, and a Ph.D. in Materials Science and Engineering from North Carolina State University. After receiving her B.S., Liya worked as a front-end-of-line integration engineer at Taiwan Semiconductor Manufacturing Company, where she supervised logic and embedded memory production. For her doctoral research, Liya used deep level transient spectroscopy and electron beam induced current imaging in a scanning electron microscope to characterize the defects in high-K dielectric material and photovoltaic silicon. Prior to joining the CNST, she worked on process optimization for deep ultraviolet lithography at the North Carolina State University Nanofabrication Facility. Liya is responsible for developing and maintaining lithography processes, wet chemistry and wafer bonding in the NanoFab and for training and assisting users. She has also been leading the fabrication process development for NanoFab remote projects.

Staff Photo - Liya Yu


Process Engineer
NanoFab Operations Group


B.S. Material Science – National Cheng Kung University, Taiwan

M.S. Electrical Engineering – State University of New York, Buffalo

Ph.D. Materials Science and Engineering – North Carolina State University


Phone: (301) 975-4590
Email: liya.yu@nist.gov