Eileen Sparks

Eileen Sparks is a Process Engineer in the CNST Nanofabrication Operations Group. She joined the CNST in February 2009 with over 30 years of experience in semiconductor process development, materials characterization, and contamination control. Eileen has B.S. and M. Ph. degrees in Chemistry from George Washington University. Early in her career, she led surface analysis research at Comsat, characterizing III-V semiconductor-based materials and devices, including failure analysis. She then joined Fusion Systems as a Process Development Engineer, developing, installing, and qualifying downstream microwave and ozone ashing processes for residue removal in OEMs and foundries world-wide. Prior to joining NIST, Eileen worked at ATMI with major chipmakers on wafer cleaning and residue removal for CMOS, MEMS, and MRAM applications. Eileen is currently assisting the NanoFab with base-line process development and industrial outreach.