Optical MEMS and NEMS
We are developing integrated optical microelectromechanical systems (MEMS) with nanoscale elements (NEMS) that will enable novel nanoscale imaging, metrology, manipulation and assembly techniques.
- Mechanically agile scanning probes
- MEMS with integrated, highly accurate optical sensing and actuation
- Holographic optical tweezers for manipulation of MEMS and NEMS
- Nanofabricated optical reference structures for high throughput, near-field optical imaging
False-color SEM image of pyramidal micromirror wells etched in silicon. The microwells can be used to track diffusing nanoparticles
in three dimensions with high precision. The largest wells are 30 μm wide.