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Optical MEMS and NEMS

Summary:

We are developing integrated optical microelectromechanical systems (MEMS) with nanoscale elements (NEMS) that will enable novel nanoscale imaging, metrology, manipulation and assembly techniques.

 

Focus Areas:

  • Mechanically agile scanning probes
  • MEMS with integrated, highly accurate optical sensing and actuation
  • Holographic optical tweezers for manipulation of MEMS and NEMS
  • Nanofabricated optical reference structures for high throughput, near-field optical imaging
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 False-color SEM image of pyramidal micromirror wells etched in silicon
 False-color SEM image of pyramidal micromirror wells etched in silicon. The microwells can be used to track diffusing nanoparticles
in three dimensions with high precision. The largest wells are 30 μm wide.
 

Contact

Vladimir Aksyuk,Phone 301-975-2867

NIST
100 Bureau Drive, MS 6203
Gaithersburg, MD 20899-6203